Semiconductor Automation
Brooks' years of experience providing application-specific solutions backed by unparalleled technology leadership, industry expertise, and a robust product portfolio include:
- MagnaTran® LEAP™ industry-standard vacuum robots.
- Marathon® turnkey or customer-specific vacuum and atmospheric systems.
- Vision® LEAP™ industry-standard load ports.
- PuroMaxx™ advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers.
- GuardianPro™ ultra clean and highly reliable storage and inspection solutions.
- PreciseFlex™ world-class collaborative robotics.